Author/Authors :
Jamshidnejad ، Maryam نويسنده Department of Physics, Khuzestan Science and Reaserch Branch, Islamic Azad University Ahvaz, I.R. Iran , , Kazeminejad، Iraj نويسنده Department of Physics, Shahid Chamran University, Ahwaz, I.R. Iran , , Razeghizadeh، Alireza نويسنده Department of Physics, Payame Noor University, Ahvaz, I.R. Iran ,
Abstract :
In this paper, a 2D stimulation model, FACET, is used for investigation of the relation between micro
structure and deposition conditions such as substrate temperature, deposition rate and deposition angle of Ag thin films. It is observed that by increasing the deposition rate in standard conditions providing that the temperature of substrate is low, the average of final grain size is decreased. While, in deposition with angle flux the average of final grain size is increased.
