Author/Authors :
M.، Chatras, نويسنده , , P.، Blondy, نويسنده , , D.، Cros, نويسنده , , O.، Vendier, نويسنده , , J.L.، Cazaux, نويسنده ,
Abstract :
A silicon micro-machined filter with a simple planar integration on an other substrate is proposed in this article. The excitation is made from the top of the shielding substrate of a membrane supported micro-machined filter. Packaging and interconnection are included in the design. Experimental results are presented on a two pole 30 GHz, 4% fractional bandwidth filter with a quality factor of 602 and insertion loss of 1.8 dB. Such a filter can be easily integrated in any circuit using flipchip technology.
