A More Effective Technique of Design Synthesis for MEMS with Expected Performance

A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed. This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equations. Solving the behavior equation group only need L design variables, L is number of desired behaviors. This behavior equa-tion group can be solved using any solution algorithm of non-linear equation group. Newton Iteration Method based on sensitivity is adopted. Comparing with Genetic Optimization Algorithm (GA) and Simu-lated Annealing Optimization Algorithm (SA), computational workload of DSA is greatly decreased. For instance, synthesis computation of a meandering resonator only needs 4 iterations (17 analyses); computa-tional time is decreased from 7~8 hours to less than 30 seconds.