Optical and Structural Properties of Ag-Si3N4 Nanocermets Prepared by Means of Ion-beam Sputtering in Alternate and Codeposition Modes

Ion-beam sputtering deposition has been used in two ways, as granular multilayers and as cosputtered film, to elaborate AgSi3 N4 nanocermets. Multilayer deposition creates slightly oblate clusters, and cosputtering produces two cluster families: elongated clusters within the Si3 N4 matrix and larger ones at the film surface. The transmittance spectra of these nanocermets are characterized by a surface plasmon resonance. In the reported research the position of this resonance is related to the morphological properties of silver nanoclusters, which are studied by transmission-electron microscopy, grazing-incidence small-angle x-ray scattering, and atomic-force microscopy. [Optical Society of America ]