Automated small tilt-angle measurement using Lau interferometry

A technique for a tilt-angle measurement of reflecting objects based on the Lau interferometry coupled with the moir, readout has been proposed. A white-light incoherent source illuminates a set of two gratings, resulting in the generation of the Fresnel image due to the Lau effect. The Fresnel image is projected onto a reflecting object. The image reflected from the object is superimposed onto an identical grating, which results in the formation of a moir, fringe pattern. The inclination angle of moir, fringes is a function of tilt angle of the object. Theory and experimental arrangement of the proposed technique is presented and results of the investigation are reported.