Title of article
Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry
Author/Authors
Rhee، Hyug-Gyo نويسنده , , Vorburger، Theodore V. نويسنده , , Lee، Jonathan W. نويسنده , , Fu، Joseph نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
-5918
From page
5919
To page
0
Abstract
Discrepancies between phase-shifting and white-light interferometry have been observed in stepheight and surface roughness measurements. The discrepancies have a strong relation to the roughness average parameter of the surface. The skewing effect, which mainly occurs in the vicinity of peaks, valleys, and edges of the sample, causes this problem in white-light interferometry of step height. For roughness, two possible sources of the discrepancy are considered.
Keywords
instrumentation , Metrology , Measurement , Height measurements , Surface measurements , Interferometry , figure , microscopy , Interference microscopy , Roughness
Journal title
Applied Optics
Serial Year
2005
Journal title
Applied Optics
Record number
74677
Link To Document