Title of article
Rugate filter made with composite thin films by ion-beam sputtering
Author/Authors
Lee، Cheng-Chung نويسنده , , Tang، Chien-Jen نويسنده , , Wu، Jean-Yee نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
-1332
From page
1333
To page
0
Abstract
Composite films of Ta-Si oxide with refractive indices that varied from 1.48 to 2.15 were realized by using rf ion-beam sputtering. All the composite films were amorphous and had a surface roughness of less than 0.3 nm. The inhomogeneity of the composite was discussed, and a rugate filter was designed and fabricated by automatic computer control.
Keywords
inhibition of S(IV) autoxidation , Sulphur dioxide , isoprene , isoprene oxidation , atmospheric VOC
Journal title
Applied Optics
Serial Year
2006
Journal title
Applied Optics
Record number
75013
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