Author/Authors :
Testorf، Markus نويسنده , , Khoury، Jed نويسنده , , Woods، Charles L. نويسنده , , Kierstead، John نويسنده , , Pyburn، Dana نويسنده , , Sengupta، Sandip K. نويسنده , , Haji-saeed، Bahareh نويسنده , , Kolluru، Rathna نويسنده , , Leon، Roberto نويسنده , , Goodhue، William نويسنده , , Drehman، Alvin نويسنده ,
Abstract :
The fabrication and characterization of an optically addressable deformable mirror for a spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5 (mu)m thick grid of patterned photoresist supports the 2 (mu)m thick aluminized Mylar membrane. A conductive ZnO layer is placed on the back side of the GaAs wafer. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage, and frequency. A simplified analysis of device operation is also presented.
Keywords :
atmospheric VOC , inhibition of S(IV) autoxidation , isoprene , Sulphur dioxide , isoprene oxidation
