• Title of article

    Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system

  • Author/Authors

    Keem، Taeho نويسنده , , Gonda، Satoshi نويسنده , , Misumi، Ichiko نويسنده , , Huang، Qianxiang نويسنده , , Kurosawa، Tomizo نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2005
  • Pages
    -3491
  • From page
    3492
  • To page
    0
  • Abstract
    The cyclic error of a homodyne interferometer is caused mainly by phase mixing due to the imperfection of polarizing optical components such as polarizing beam splitters. In Appl. Opt. 43, 2443 (2004), we concentrated on the relationship between these imperfect optical characteristics and the cyclic error and found the preamplifier-gains condition for removing the cyclic error. Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 (mu)m.
  • Keywords
    General , Equipment , Techniques , Measurement , Interferometry , Metrological instrumentation , instrumentation , Metrology
  • Journal title
    Applied Optics
  • Serial Year
    2005
  • Journal title
    Applied Optics
  • Record number

    75963