Title of article
Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system
Author/Authors
Keem، Taeho نويسنده , , Gonda، Satoshi نويسنده , , Misumi، Ichiko نويسنده , , Huang، Qianxiang نويسنده , , Kurosawa، Tomizo نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
-3491
From page
3492
To page
0
Abstract
The cyclic error of a homodyne interferometer is caused mainly by phase mixing due to the imperfection of polarizing optical components such as polarizing beam splitters. In Appl. Opt. 43, 2443 (2004), we concentrated on the relationship between these imperfect optical characteristics and the cyclic error and found the preamplifier-gains condition for removing the cyclic error. Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 (mu)m.
Keywords
General , Equipment , Techniques , Measurement , Interferometry , Metrological instrumentation , instrumentation , Metrology
Journal title
Applied Optics
Serial Year
2005
Journal title
Applied Optics
Record number
75963
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