MST MEMS model order reduction: Requirements and benchmarks

The needs for model reduction in microsystem technology (MST) are described from an engineering perspective. Two representative MST model reduction benchmarks are presented in order to facilitate further development in this area. The first benchmark application is from the area of electro-thermal simulation, the second one considers an electrostatically actuated beam as found in radio frequency applications. Model reduction is contrasted with compact modeling, which currently enjoys widespread use among engineers, and important challenges to be addressed are listed.