Abstract :
The fracture strength of Si is considered in the context of yield and reliability of microelectronic
and microelectromechanical (MEMS) devices. An overview of Si fracture, including the strength
of Si wafers, dice and MEMS elements, highlights the importance of understanding sharp
contact flaws, with their attendant residual stress fields, lateral cracks and strength-limiting
half-penny cracks in advanced Si device manufacturing. Techniques using controlled
indentation flaws, including measurements of hardness, crack lengths, crack propagation under
applied stress, and inert and reactive strengths, are applied in an extensive new experimental
study of intrinsic, n- and p-type {100} and {110} Si single crystals and polycrystalline Si,
addressing many of the issues discussed in the overview. The new results are directly
applicable in interpreting the strengths of ground or diced Si wafer surfaces and provide a
foundation for studying the strengths of MEMS elements, for which the strength-controlling
flaws are less well-defined. Although the indentation fracture behavior of Si is shown to be
quite anisotropic, the extensive lateral cracking greatly affects crack lengths and strengths,
obscuring the underlying single crystal fracture anisotropy. No effects of doping on fracture are
observed. Strength decreases in water and air suggest that Si is susceptible to reactive attack
by moisture, although the effect is mild and extremely rapid. Strength increases of indented
components after buffered HF etching are shown to be due to reactive attack of the contact
impression, leading to residual stress relief. C 2006 Springer Science + Business Media, Inc.
