Abstract :
Chemical vapor deposition (CVD) of diamond
films and wafers is a well established and flexible
technology in which deposition parameters control the
deposition rate as well as diamond properties, quality
and shape. This article deals with surface morphology
and crystallography of wafers, with emphasis on twin
blocks and twin quintuples. In the study described here
we have determined surface facet crystallography of
two diamond wafers groups, one that contains S3 twin
blocks and the other that has a large population of twin
quintuplets. The tool used for the study is a scanning
electron microscope (SEM) and the technique to
identify surface crystallography involves only accurate
tilting and surface observation. A basic knowledge of
the twin structure enables accurate determination of
surface crystallography.