Author/Authors :
Pascale Villain، نويسنده , , Philippe Goudeau، نويسنده , , Frederic Badawi، نويسنده , ,
G. Ouyang، نويسنده , , G. W. Yang، نويسنده , , Ve´ronique Pe´losin، نويسنده ,
Abstract :
A metastable solid solution has been observed
in immiscible W/Cu multilayers sputter deposited with
very low period ( £ 3 nm). A recent model evidencing size
dependence of surface energies and diffusion coefficients
in bilayers may explain the observed trends since diffusion
coefficients highly increase when layer thickness decreases.
Furthermore, implantation effects of the energetic
incoming atoms during layer deposition undoubtedly
reinforce these mixing phenomena.
