Title of article :
Polishing rate for (100) and (110) surfaces
Author/Authors :
Yutaka Hasegawa، نويسنده , , Sasuke Miyazima، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1996
Abstract :
We have suggested a simple model for polishing. The model introduced images a float polishing method. We analyze the roughness of the surface during the polishing process from a fractal point of view. The present model provides results in agreement with the experimental fact that the (110) surface of Si is polished faster than (100).
Journal title :
Physica A Statistical Mechanics and its Applications
Journal title :
Physica A Statistical Mechanics and its Applications