XPS and PL studies of porous silicon treated in water and oxygen-rich gases

The chemical structure and luminescence properties of porous silicon (PS) were investigated by X-ray photoelectron (XPS) and photoluminescence (PL) spectroscopy. All of the as-anodized samples have two components of Si2p XPS spectra. Several models have been proposed to describe the large intensities of the oxygen component of these spectra. The structure of the silicon oxide in PS after treatment in oxygen-rich gases is more ordered than in both as-anodized and water-treated samples.