Real-time translational control of a MEMS comb resonator

Closed-loop control has been successfully applied to a microelectromechanical systems (MEMS) lateral comb resonator device in real-time to perform impulse disturbance damping and sinusoidal position control, enabled by the use of a throughwafer optical microprobe to obtain position feedback. This result leverages the application of lifetime, in-situ control of MEMS in order to provide quality assurance of microsystems in safety critical applications. A position feedback signal produced by a through-wafer optical microprobe has been used for comb resonator system model identification by two independent methods to accurately determine the effective mass, damping, and spring constant values of the device. After accurate determination of system parameters, closed-loop impulse disturbance damping and proportional-integral-differential (PID) translational control were applied. Closed-loop control results presented indicate controllability of such microstructures and response times on the order of the natural frequency of the device.