Title of article
Metallization proximity studies for copper spiral inductors on silicon
Author/Authors
Sia، Choon Beng نويسنده , , Yeo، Kiat Seng نويسنده , , Do، Manh Anh نويسنده , , Ma، Jian-Guo نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
-21
From page
22
To page
0
Abstract
The impacts of metallization proximity for copper spiral inductors on silicon have been investigated in this paper. Performance of the spiral inductor versus area consumption tradeoff with respect to its core diameter is evaluated quantitatively for the first time. Effects of the inductorʹs proximate grounded metallization on its overall inductive performance are also analyzed.
Keywords
Gene regulation , male reproductive tract , spermatid , spermatogenesis , testis
Journal title
IEEE Transactions on Semiconductor Manufacturing
Serial Year
2003
Journal title
IEEE Transactions on Semiconductor Manufacturing
Record number
95489
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