Title of article
Photothermal surface-micromachined actuators
Author/Authors
Y.B.، Gianchandani, نويسنده , , A.D.، Oliver, نويسنده , , S.R.، Vigil, نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
-1155
From page
1156
To page
0
Abstract
We report on the optical actuation of surface micromachines. Optical energy is absorbed by the micromachines and converted to heat, which causes differential thermal expansion between different parts of the device and up to 12 (mu)m of displacement. The polysilicon actuators are homogenous and electrically isolated.
Keywords
boundary-layer equation , Laminar flow , Turbulent flow , iterative method , noniterative method , nonlinear parabolic partial-differential equation
Journal title
IEEE TRANSACTIONS ON ELECTRON DEVICES
Serial Year
2003
Journal title
IEEE TRANSACTIONS ON ELECTRON DEVICES
Record number
95716
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