Title of article
Plastic micromachining assisted by ultraviolet illumination
Author/Authors
T.، Maleki, نويسنده , , S.، Mohajerzadeh, نويسنده , , Afzali-Kusha، A نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
-1812
From page
1813
To page
0
Abstract
A novel ultra-violet assisted micro-machining technique is presented in which the etching of Poly-Ethylene-Terephthalate substrates is anisotropic in the direction of light illumination in a Di-Methyl-Formamide solution. The effects of solution temperature and light intensity have been studied. An average etch rate of 10 (mu)m/hr is achieved with insignificant mask undercut.
Keywords
folate , homocysteine , Ischaemic heart disease , Cretan Mediterranean diet
Journal title
IEEE TRANSACTIONS ON ELECTRON DEVICES
Serial Year
2003
Journal title
IEEE TRANSACTIONS ON ELECTRON DEVICES
Record number
95863
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