• Title of article

    Lateral ion implant straggle and mask proximity effect

  • Author/Authors

    R.، Mann نويسنده , , J.، Brown, نويسنده , , T.B.، Hook, نويسنده , , P.، Cottrell, نويسنده , , E.، Adler, نويسنده , , D.، Hoyniak, نويسنده , , J.، Johnson, نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2003
  • Pages
    -1945
  • From page
    1946
  • To page
    0
  • Abstract
    Lateral scattering of retrograde well implants is shown to have an effect on the threshold voltage of nearby devices. The threshold voltage of both NMOSFETs and PMOSFETs increases in magnitude for conventional retrograde wells, but for triplewell isolated NMOSFETs the threshold voltage decreases for narrow devices near the edge of the well. Electrical data, SIMS, and SUPREM4 simulations are shown that elucidate the phenomenon.
  • Keywords
    spermatid , spermatogenesis , male reproductive tract , Gene regulation , testis
  • Journal title
    IEEE TRANSACTIONS ON ELECTRON DEVICES
  • Serial Year
    2003
  • Journal title
    IEEE TRANSACTIONS ON ELECTRON DEVICES
  • Record number

    95885