Plasma properties and stoichiometry of laser-deposited BiSrCaCuO thin films

The composition of BiSrCaCuO films deposited by laser ablation in different gas environments (Ar or O2) is related to the interaction processes observed in the plasma by means of optical emission spectroscopy. It is found that films deposited in Ar or O2 exhibit an increase of Bi and a decrease of Sr, Ca and Cu contents with respect to films deposited in vacuum. These changes in composition are discussed in terms of the processes that may affect the film growth such as collisional interaction processes in the gas phase and re-sputtering.