A quantitative estimation of the sensitivity of field-emission pressure-gauge

The sensitivity of field-emission pressure-gauge was studied from both theoretical and experimental aspects. The focus of the study was to find new operation modes which can allow real-time measurements of the vacuum pressure. The sensitivity S=7.1×103Pa−1s−1 (N2 equivalent) was experimentally determined for the residual gas of ion-pumped systems. For hydrogen, it was found that the sensitivity is mainly determined by the product of the dipole moment and the sticking probability of the adsorption system. Some possible effects attributed to electric fields required for field emission were considered and examined. It was concluded that under the usual operating field there was no significant effect on the sensitivity of the field-emission pressure-gauge.