Author/Authors :
M. Zaborowski، نويسنده , , A. Barcz، نويسنده , , G. Gawlik، نويسنده , , I.W. Rangelow، نويسنده ,
Abstract :
The influence of irradiation of Al or Al-based films on the surface morphology is studied by a number of methods. F, B, Mg, Cd, As, Sb, Cr and Ar were chosen as implanting species in order to cover a wide variety of chemical reactivities with aluminium. Implantation of boron and, to a lesser extent, of fluorine or chromium was found beneficial in suppressing population of hillocks, predominantly those of medium or larger size.
