Author/Authors :
Ting-Chang Chang، نويسنده , , Wen-Kuan Yeh، نويسنده , , Chun-Yen Chang، نويسنده , , Tz-Guei Jung، نويسنده , , Wen-Chung Tsai، نويسنده , , Guo-Wei Huang، نويسنده , , Yu-Jane Mei، نويسنده ,
Abstract :
A series of SiSi1−xGex disordered superlattices with various degrees of disorder were grown in an ultrahigh vacuum chemical vapor deposition system (UHV/CVD). High-resolution double-crystal X-ray diffraction (HRXRD), and conventional cross-sectional transmission electron microscopy were used to evaluate the crystalline quality of these superlattices. A dynamical X-ray simulation program was employed to analyze the experimental rocking curves. Excellent matches between experimental rocking curves and simulated ones were obtained for all superlattices with various degrees of disorder.
