Structural and optical properties of Pd1−xInx thin films

Pd1−xInx (0.4 < x < 0.56) thin films have been prepared by RF sputtering from a multi-zone target. Their structural and optical properties have been studied by X-ray diffractometry, near normal incidence optical reflectivity and ellipsometry. Both structural and optical properties exhibit composition dependent characteristics. Indium-deficient films include Pd in antisite positions. Indium-rich films incorporate Pd vacancies. The optical spectrum shows both free electron-like properties and interband transitions giving rise to absorption peaks around 2.7 and 4.8 eV. A rigid band model is not sufficient to explain the optical properties of the alloys. The effects of Pd antisite atoms and Pd vacancies on the band structure must be taken into account to explain the evolution of the optical parameters.