Cross-sectional TEM investigations of plasmapolymer-metal composite films

Plasmapolymer-metal composite films were investigated by means of cross-sectional transmission electron microscopy (XTEM). Copper and silver were encapsulated as small particles in the plasmapolymer matrix. Size and shape of the silver particles depend on the polymerization power density. Within films deposited with low polymerization power density, the silver particles are almost spherical and a three-dimensional particle distribution was found in the polymer matrix. However, the shape of the particles in films deposited at higher power density is more elliptic and the particle distribution is two-dimensional. High resolution images demonstrate the structure of single silver particles. By lateral and cross-sectional transmission electron microscopy the size and shape of the encapsulated particles could be reconstructed three-dimensionally.