Single crystal laser patterning for selective YBa2Cu3O7−x growth

The effect of laser irradiation on single crystals which are widely used for YBa2Cu3O7−x (YBCO) deposition is studied, in order to determine the feasibility of selective growth on laser patterned substrates as an alternative to YBCO patterning. Excimer laser radiation (KrF, ArF) was used to pattern YSZ(100), LaAlO3(100) and SrTiO3, single crystals with fluences ranging from 0.05 to 20 J cm−2 using different number of pulses and pulse repetition rates (0.5–40 Hz). Down to 10 μm wide bridges were obtained by mask projection in order to study pattern definition on each material. Optimal parameters depend strongly on the material due to their different physical properties, leading to clean patterns surrounded by different kinds of locally induced damage.