Deposition of optical coatings by pulsed laser ablation

Hafnia, zirconia and yttria films for optical applications were prepared by pulsed laser deposition using an excimer laser at 248 nm wavelength. The growing films were bombarded by oxygen ions. Films were investigated with regard to refractive index, absorption and laser damage thresholds. Based on the findings that the refractive index varies with ion bombardment and growth rate it is shown that multilayer systems with regard to refractive index consisting of only one material can be prepared. Such multilayers were investigated with regard to reflectivity and laterally resolved absorptivity.