Title of article
An experimental study and modeling of the thickness distribution in pulsed laser deposited ferroelectric thin films
Author/Authors
M. Tyunina، نويسنده , , K. Sreenivas، نويسنده , , C. Bjormander، نويسنده , , J. Wittborn، نويسنده , , K.V. Rao، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1996
Pages
5
From page
831
To page
835
Abstract
We present a systematic experimental study of the thickness profiles and the growth rates of ferroelectric lead zirconium titanate (PZT) thin films, formed by pulsed laser deposition, both in vacuum and in an oxygen ambient. The results are explained in terms of the adiabatic expansion model for the laser generated plasma plume.
Journal title
Applied Surface Science
Serial Year
1996
Journal title
Applied Surface Science
Record number
990685
Link To Document