Author/Authors :
C. Garapon، نويسنده , , C. Champeaux، نويسنده , , J. Mugnier، نويسنده , , G. Panczer ، نويسنده , , P. Marchet ، نويسنده , , A. Catherinot، نويسنده , , B. Jacquier، نويسنده ,
Abstract :
TiO2 thin films have been deposited on SiO2Si, MgO and Al2O3 substrates by Pulsed Laser Deposition with a KrF excimer laser from a rutile ceramic target. From X-ray diffraction and Raman spectroscopy, their crystalline structure appear to be mainly anatase. The potentialities of waveguiding properties have been evaluated by measuring refractive index and thickness with m-line spectroscopy.
