Intrinsic Auger signal profiles derived by Monte Carlo analysis

A Monte Carlo simulation with cascade secondary electron generation has recently enabled us to obtain the background formed by backscattered electrons in Auger spectra. Applying this approach to experimentalEN(E)-spectrameasured by Goto et al. with a novel CMA, we have derived the Cu-LMM spectrum with the background fully subtracted. Further Monte Carlo calculation of the response function for Auger electrons has then yielded the background due to inelastically scattered Auger electrons. Compared to Tougaardʹs background subtraction method, the intrinsic Auger signal profile obtained by the present Monte Carlo analysis shows stronger Auger electron intensities at the lower energy side and describes much better the experimental spectrum.