Water vapor effects on theTeO2/Tethin film conductance

An investigation of water vapor effects on the electrical conductivity of aTeO2/Tethin film is carried out. TeO2 evaporated from the BN boat was deposited onto the Te film. TeO2 and Te layers are of 30 nm thick and 100 nm thick, respectively. Electrical conductance measurements of theTeO2/Tethin film were performed in the chamber maintained at constant temperatures. The conductance of theTeO2/Tethin film in wet argon is lower than that in dry argon. These phenomena suggest that theTeO2/Tethin film can be applied to a new humidity sensor. The desorption rate constant analysis reveals that the activation energy of the H2O desorption is ca. 32 kJ/mol, which indicates weak-chemical adsorption of H2O molecules on theTeO2/Tethin film surface.