SNMS characterization of ion irradiated GaAs surfaces

This study deals with the phenomena that influence the relative intensity of the sputtered neutral yields when altered layers of GaAs are analysed by using sputtered neutral mass spectrometry (SNMS) technique. The altered layers were obtained by irradiation with He+, Ne+, Ar+, Kr+, Xe+ and O2+ ions of various energies, in order to explore different nuclear stopping power regimes. The main result is a considerable change both of the absolute and relative yields of As and Ga as a function of the bombarding time, type and energy of primary ions. The absolute variation in the sputtered neutral signal is probably related with the amorphization of the outer layers. The relative variation in the yield of As with respect to Ga is not due to true preferential sputtering but to surface segregation followed by removal of the segregated species during the bombardment.