• Title of article

    Bistabilities in pyrolytic laser-CVD of silicon and carbon

  • Author/Authors

    P.B. Kargl، نويسنده , , N. Arnold، نويسنده , , D. B?uerle، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1997
  • Pages
    6
  • From page
    257
  • To page
    262
  • Abstract
    In pyrolytic laser-CVD of silicon and carbon, bistable growth with a pronounced hysteresis was observed within certain regimes of scanning velocities and laser powers. In order to study the influence of changes in heat conductivities and activation energy, we have deposited onto different substrate materials silicon from SiH4 and Si2H6 and carbon from CH4, C2H2, and C2H4.
  • Journal title
    Applied Surface Science
  • Serial Year
    1997
  • Journal title
    Applied Surface Science
  • Record number

    991291

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=991291