Precise laser ablation with ultrashort pulses

Laser ablation of solid targets by Ti:sapphire laser radiation is studied. The targets are irradiated by 150 fs–5 ns laser pulses with a fluence in the range of several J/cm2. Measurements on the ablation depth yield an effective penetration depth higher than the optical penetration depth. Advantages and potentials of sub-picosecond laser radiation for the ablation and for the microstructuring of metals are demonstrated.