Selective surface modification of ceramics with laser radiation

Laser-assisted processes that enable the direct fabrication of conducting structures and contacts on ceramic substrate materials (AlN, Al2O3) through modification are presented. These can serve as an alternative to conventional methods of thick film, thin film and chemical metallization. A method for fabrication of conductive structures on Al2O3 with CO2 laser irradiation (λ=10.6 μm) is developed and a corresponding procedure for AlN with excimer laser irradiation (λ=248 nm) is examined. The changes of resistance in the modified areas dependent on the processing variables are investigated and correlated to the results of a chemical analysis by means of electron beam microprobe.