Pulsed-laser deposition of Y–Ba–Cu–O films: the influence of fluence and oxygen pressure

The electrical and morphological properties of YBa2Cu3O7−x (YBCO) films, including the number density of particulates, strongly depend on the oxygen background pressure employed during deposition. The degradation of electrical and morphological film properties observed at low oxygen pressures can be compensated by a decrease in laser fluence, while the number density of particulates increases with decreasing fluence.