The electrical field effect on the growth of titanium oxide layers by ML-ALE

Study of the electric field effect on the titanium oxide growth by molecular layering (ML)-atomic layer epitaxy (ALE) method was produced in the present work. It was found that electric field effect on the adsorption process of the precursors during ML-ALE cycles under both polarities of a field. The field affect depended on a stage of a cycle ML-ALE (half-reaction of ML-ALE). The strength of a field strongly influenced on the thickness of titanium oxide layers in the beginning of a growth process until the layer thickness reached 5.0–6.0 nm. It was found that field influence did not depend on a sublayer composition. The electric field affect at different temperatures and voltages was studied. It was found that electric field effected a structure of the synthesized layers. At room temperature we synthesized a rutile structure — the more thermodynamically stable modification of titanium oxide. The explanation of these results was made on the basis of an electronic adsorption theory.