Abstract :
High resolution Auger electron spectroscopy was performed on 111.and 100.facets as well as on a microvoid of
polycrystalline diamond films. Auger fine structure analyses of these facets indicate anomalous line shapes when electron
beam was focused to about 0.2 mm diameter in contrast to the large area scans beam size ;10=8 mm.which exhibit a
typical Auger pattern characteristic of diamond. This unusual behavior is discussed in terms of surface reconstruction which
may occur due to Auger assisted desorption of hydrogen.
