Title of article :
Strain distribution around a NiSi,/Si interface measured by
convergent beam electron diffraction
Author/Authors :
Yutaka Wakayama * ، نويسنده , , Shun-ichiro Tanaka، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1997
Abstract :
Yutaka Wakayama * , Shun-ichiro Tanaka
Keywords :
Interface , CBED , islands , Nisi , Si , Strain
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science