Atom configuration study of &doped Er in InP by fluorescence EXAFS

We have investigated OMVPE-grown InP &doped with Er by EXAFS. The EXAFS measurement revealed that Er atoms which were &doped in InP by exposing to Er source for 12 min at 530°C (15 min Er-exposed sample) formed NaCl-structure ErP whose Er-P bond length was 2.80 f 0.03 A. The 10 min Er-exposed sample at 580°C showed a spectrum similar to cubic bixbyite structure Er,O, which was not observed in uniformly Er-doped InP samples. For the 40 min Er-exposed sample at 53O”C, Er atoms formed both ErP and Er,O,.