Occupation site and distribution of S-doped Er in InP measured by X-ray CTR scattering

Atomic level hetero-structure analysis of Er S-doped InP grown by OMVPE was successfully made by the X-ray crystal truncation rod (CTR) scattering measurement using synchrotron radiation. It was shown that Er atoms in the S-doped InP formed rocksalt structure ErP. Distributions of the Er atoms around the S-doped layers were also revealed clearly on the atomic scale. The total amounts of incorporated Er increased exponentially as the Er supply time increased