AFM studies on ZnS thin films grown by atomic layer epitaxy

Polycrystalline ZnS films were grown from ZnCl2 and H2S on glass and mica using the atomic layer epitaxy ALE. technique. Morphological and crystalline changes during the ALE growth of ZnS were studied by AFM and XRD. AFM measurements revealed that substantial agglomeration took place in the beginning of the growth. On glass the nucleation density of ZnS was higher than on mica and consequently the films on glass remained smoother than those on mica. XRD measurements revealed that orientation of the films was stronger on mica than on glass. q1997 Elsevier Science B.V.