Observation of short-wavelength recorded pits in GeSb Te phase 2 4 change thin film by atomic force microscopy

Atomic force microscopy AFM.was used to study the microstructure of short-wavelength recorded pits in GeSb2Te4 phase change thin film. Microarea morphology images show that the recorded domain bulges after laser irradiation. With the increase of writing pulse width, a depression appears in the center of the recorded pits. It is demonstrated that AFM is a very useful tool to evaluate the recorded pits and improve the performance of phase change media. q1997 Elsevier Science B.V.