CeO2 thin films on Si(100) obtained by pulsed laser deposition

Thin films of CeO2 have been deposited on single crystal silicon (100) samples at room temperature by using pulsed laser deposition (PLD). The study of ion–molecule reactions occurring in the microplasma (by laser microprobe coupled with mass spectrometry (LMMS)) allows the understanding of the oxygen deficiency observed in films by X-ray photoelectron spectroscopy (XPS).