• Title of article

    CeO2 thin films on Si(100) obtained by pulsed laser deposition

  • Author/Authors

    L Cossaruttoa، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1998
  • Pages
    4
  • From page
    352
  • To page
    355
  • Abstract
    Thin films of CeO2 have been deposited on single crystal silicon (100) samples at room temperature by using pulsed laser deposition (PLD). The study of ion–molecule reactions occurring in the microplasma (by laser microprobe coupled with mass spectrometry (LMMS)) allows the understanding of the oxygen deficiency observed in films by X-ray photoelectron spectroscopy (XPS).
  • Keywords
    Pulsed laser deposition , Si(100) , CeO2 thin films
  • Journal title
    Applied Surface Science
  • Serial Year
    1998
  • Journal title
    Applied Surface Science
  • Record number

    992393

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=992393