Abstract :
Low loss composites have been fabricated in thick and thin film forms for a broad range of frequency applications. The
thin film composites of barium strontium titanium oxide BSTO.have been primarily developed by the pulsed laser ablation
PLA.method. This deposition technique has produced high quality thin films of BSTO composites on various substrates wS.
Sengupta, L.C. Sengupta, W.E. Kosik, Pulsed laser deposition of ferroelectric thin films in conjunction with superconducting
oxides, IEEE Cata 94CH3416-5, 431xwAnalysis of ferroelectric thin films deposited by the pulsed laser deposition method
on oxide and fluoride substrates, IEEE Cata 94CH3416-5, 70xwS. Sengupta, D.P. Vijay, S.B. Desu, Thin films of novel
ferroelectric composites, Proceedings of MRS, 361, 1995, 545xwS. Sengupta, L.C. Sengupta, Novel pyroelectric sensor
materials, submitted to the Special Issue on Sensors and Actuators of the IEEE Transactions on Ultrasonics, Ferroelectrics,
and Frequency Controlx. The objective of this work is to elucidate the PLA deposition parameters of the BSTO composite
thin films. The material characterization and the electronic parameters of the thin films will also be presented. Finally, the
patterning techniques required to fabricate the BSTO composite thin film phase shifters will be discussed. Some preliminary
results of the phase shifter characterization will also be presented. q1998 Elsevier Science B.V.
