Influence of the deposition parameters on the structural and transport properties of YBaCuO thin films prepared by pulsed laser deposition

YBCO superconducting films were deposited by XeCls308 nm.pulsed laser deposition PLD. on 100.-oriented SrTiO3, MgO and Si single crystal substrates. Control of the YBCO thin film epitaxial growth and microstructure quality are important factors for superconducting electronic device applications. In this aim, we studied the influence of the oxygen pressure during the growth, the distance between target–substrate and substrate structure on the degree of structural orientation and surface quality of the films. X-ray diffraction XRD., scanning electron microscopy SEM.and atomic force microscopy AFM.techniques were used to make comparative studies of microstructure with transport properties of the films. q1998 Elsevier Science B.V.