Thickness of Ta O thin-films deposited by a new pulsed laser 2 5 deposition technique

The thickness of the film deposited by a new off-axis pulsed laser deposition method using an aperture plate is studied by observing the laser plume using a streak camera. Interestingly, it appears that the oxygen pressure dependence of the film thickness corresponds to the total emission of the plume integrated over the time and space. It can therefore be concluded that the total emission is proportional to the number of target species that pass through the aperture hole, and that these species are deposited on the off-axis substrates. q1998 Elsevier Science B.V