Synthesis of carbon films using pulsed laser deposition method with frozen CH and CO targets

A novel pulsed laser deposition PLD.process with frozen CH4andror CO2is developed. Frozen CH4andror CO2 formed on the graphitic carbon GC.target at 12 K, then co-ablated with the GC target, using a KrF excimer laser. The present method is effective in enhancing the dissociation of raw materials and suppressing the large splashing particles. The characteristics of the deposited carbon films depend on the target material and on the substrate temperature. Under the proper conditions, the films show the characteristics of diamond-like carbon in the Raman spectrum. According to the high resolution transmission electron microscopy, these films contain nanometer-sized diamond embryos. q1998 Elsevier Science B.V.