PLD fabrication of a soft X-ray multilayer mirror and LPP reflectance test

A soft X-ray mirror based on a molybdenum–silicon MorSi.multilayer structure has been fabricated by the pulsed laser deposition PLD.technique. The multilayer was designed to reflect at 196 A° for normal incidence operation. An iterative graphical procedure was used to calculate the optimum periodic multilayer structure. The normal incidence reflectance of the multilayer was determined using a continuum source of soft X-rays from a laser-produced plasma LPP.. The multilayer peak reflectance was 7.3% at 190 A° , with the magnitude of reflectance consistent with an effective interfacial roughness within the structure equal to ;15 A° . q1998 Elsevier Science B.V.